Aixtron says MIT Lincoln Laboratory orders two Hyperion 300-mm deposition systems

  • Aixtron disclosed an order from MIT Lincoln Laboratory for two Hyperion 300 mm deposition systems to support GaN power and RF research.
  • The second tool will target next-generation 2D materials research, including transistor development and remote epitaxy.
  • Both systems will be installed at MIT Lincoln Laboratory, configured mainly for 200 mm wafers while retaining up to 300 mm capability.


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