** AI semiconductor equipment maker Amtech Systems ASYS.O shares up 1.9% premarket to $21.05 after $60 mln follow-on priced

** Tempe, Arizona-based ASYS late Mon said it sold ~2.9 mln shares at $20.50 vs their last close of $20.65

** Co intends to use net offering proceeds to grow its semiconductor packaging and advanced wafer substrate fabrication platforms, for potential M&A, among other purposes

** Titan Capital Partners, a division of American Capital Partners, sole bookrunner

** ASYS has ~14.6 mln shares outstanding as of May 21, per the prospectus

** At Mon close, stock up 65% YTD