Oxford Instruments wins Rigetti order for PlasmaPro 100 Cobra atomic layer etch system

Rigetti Computing, Inc.

Rigetti Computing, Inc.

RGTI

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  • Oxford Instruments received an order from Rigetti Computing for a PlasmaPro 100 Cobra atomic layer etch system for dedicated fabrication of quantum devices, announced May 22, 2026.
  • The tool will be installed at Rigetti’s Fab-1 quantum foundry in Fremont, California, as part of an expansion of advanced manufacturing capacity.
  • Rigetti aims to use the added etch capability to support scaling toward higher qubit-count systems for error correction and fault-tolerant quantum computing.


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